One-step fabrication of polymer components for microphotonics by gray scale electron beam lithography

Approved

Authors of the publication

Number of authors
3
Authors
Dong L, Popov S, Friberg AT

Publication channel information

Title of journal/series
Journal of the european optical society: rapid publications
ISSN (electronic)
1990-2573
ISSN (linking)
1990-2573
Publication forum ID
61884
Country of publication
Germany
Internationality
Yes

Detailed publication information

Publication year
2011
Journal/series volume number
6
Page numbers
-

Co-publication information

International co-publication
Yes

Classification and additional information

MinEdu field of science classification
114 Physical sciences
Additional information
DOI: 10.2971/jeos.2011.11010,