One-step fabrication of polymer components for microphotonics by gray scale electron beam lithography

Approved

Publication information

OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Number of authors
3
Authors
Dong L, Popov S, Friberg AT

Publication channel information

Title of journal/series
Journal of the european optical society: rapid publications
ISSN (electronic)
1990-2573
ISSN (linking)
1990-2573
Publication forum ID
61884
Country of publication
Germany
Internationality
Yes

Detailed publication information

Publication year
2011
Journal/series volume number
6
Page numbers
-

Co-publication information

International co-publication
Yes

Classification and additional information

MinEdu field of science classification
114 Physical sciences
Additional information
DOI: 10.2971/jeos.2011.11010,