Protection of industrial sensors with ta-C

Not for data collection

Publication information

OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Authors
Tiainen V-M, Lappalainen R, Anttila A
Local authors
Unit
Ei laitostietoa

Publication channel information

Title of journal/series
Vacuum
ISSN (print)
0042-207X
ISSN (electronic)
1879-2715
ISSN (linking)
0042-207X
Publication forum ID
68885
Internationality
Yes

Detailed publication information

Publication year
2002
Journal/series volume number
67
Page numbers
599-604
Language of publication
English

Co-publication information

International co-publication
No