Antireflective nanostructured microlenses

Not for data collection

Classifications

MinEdu publication type
A1
Category
Artikkelit ja abstraktit
Refereed
Kyllä
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli

Publication information

OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Authors
Birgit Päivänranta;Pierre-Yves Baroni;Toralf Scharf;Wataru Nakagawa;Markku Kuittinen;Hans Peter Herzig
Local authors
Author
Päivänranta Birgit

Publication channel information

Title of journal/series
Microelectronic engineering
ISSN (print)
0167-9317
ISSN (electronic)
1873-5568
ISSN (linking)
0167-9317
Publication forum ID
63335
Internationality
Yes

Detailed publication information

Publication year
2008
Journal/series volume number
85
Journal/series issue number
5-6
Page numbers
1089-1091
Language of publication
English

Co-publication information

International co-publication
Yes

Classification and additional information

Keywords
, interferometric lithography, microlenses, antireflection,