Antireflective nanostructured microlenses

Not for data collection

Authors of the publication

Authors
Birgit Päivänranta;Pierre-Yves Baroni;Toralf Scharf;Wataru Nakagawa;Markku Kuittinen;Hans Peter Herzig
Local authors
Author
Päivänranta Birgit
Unit
Ei laitostietoa

Publication channel information

Title of journal/series
Microelectronic engineering
ISSN (print)
0167-9317
ISSN (electronic)
1873-5568
ISSN (linking)
0167-9317
Publication forum ID
63335
Internationality
Yes

Detailed publication information

Publication year
2008
Journal/series volume number
85
Journal/series issue number
5-6
Page numbers
1089-1091
Language of publication
English

Co-publication information

International co-publication
Yes

Classification and additional information

Subject headings
, interferometric lithography, microlenses, antireflection,