Antireflective nanostructured microlenses

Not for data collection

Publication information

OKM publication type

A1

Category

Artikkelit ja abstraktit

Sub category

Tieteelliset aikakauslehtiartikkelit

Type

Alkuperäisartikkeli

Refereed

Kyllä

Authors of the publication

Authors

Birgit Päivänranta;Pierre-Yves Baroni;Toralf Scharf;Wataru Nakagawa;Markku Kuittinen;Hans Peter Herzig

Local authors

Author

Päivänranta Birgit

Unit

Ei laitostietoa

Publication channel information

Title of journal/series

Microelectronic engineering

Publication forum ID

63335

Internationality

Yes

Detailed publication information

Publication year

2008

Journal/series volume number

85

Journal/series issue number

5-6

Page numbers

1089-1091

Language of publication

English

Co-publication information

International co-publication

Yes

Classification and additional information

Subject headings

, interferometric lithography, microlenses, antireflection,