Antireflective nanostructured microlenses
Not for data collection
Classifications
MinEdu publication type
A1
Category
Artikkelit ja abstraktit
Refereed
Kyllä
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Publication channel information
Title of journal/series
Microelectronic engineering
ISSN (print)
0167-9317
ISSN (electronic)
1873-5568
ISSN (linking)
0167-9317
Publication forum ID
63335
Internationality
Yes
Detailed publication information
Publication year
2008
Journal/series volume number
85
Journal/series issue number
5-6
Page numbers
1089-1091
Language of publication
English
Co-publication information
International co-publication
Yes
Classification and additional information
Keywords
, interferometric lithography, microlenses, antireflection,