Improvement of UV-moulding accuracy by heat and solvent assisted process

Not for data collection

Publication information

OKM publication type

B1

Category

Artikkelit ja abstraktit

Sub category

Tieteelliset aikakauslehtiartikkelit

Type

Alkuperäisartikkeli

Refereed

Ei

Authors of the publication

Authors

Juha Pietarinen;Valtteri Kalima;Tuula T. Pakkanen and Markku Kuittinen

Local authors

Unit

Ei laitostietoa

Author

Pakkanen Tuula

Unit

Ei laitostietoa

Publication channel information

Title of journal/series

Microelectronic engineering

Internationality

Yes

Detailed publication information

Publication year

2008

Journal/series volume number

85

Page numbers

263-270

Language of publication

English

Co-publication information

International co-publication

Yes

Classification and additional information

Subject headings

, microstructures, photopolymers, uv-moulding, replication,