Improvement of UV-moulding accuracy by heat and solvent assisted process

Not for data collection

Authors of the publication

Authors
Juha Pietarinen;Valtteri Kalima;Tuula T. Pakkanen and Markku Kuittinen
Local authors
Unit
Ei laitostietoa
Author
Pakkanen Tuula
Unit
Ei laitostietoa

Publication channel information

Title of journal/series
Microelectronic engineering
ISSN (print)
0167-9317
ISSN (electronic)
1873-5568
ISSN (linking)
0167-9317
Internationality
Yes

Detailed publication information

Publication year
2008
Journal/series volume number
85
Page numbers
263-270
Language of publication
English

Co-publication information

International co-publication
Yes

Classification and additional information

Subject headings
, microstructures, photopolymers, uv-moulding, replication,