Improvement of UV-moulding accuracy by heat and solvent assisted process

Not for data collection

Publication information

OKM publication type
B1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Ei

Authors of the publication

Authors
Juha Pietarinen;Valtteri Kalima;Tuula T. Pakkanen and Markku Kuittinen
Local authors
Unit
Ei laitostietoa
Author
Pakkanen Tuula
Unit
Ei laitostietoa

Publication channel information

Title of journal/series
Microelectronic engineering
ISSN (print)
0167-9317
ISSN (electronic)
1873-5568
ISSN (linking)
0167-9317
Internationality
Yes

Detailed publication information

Publication year
2008
Journal/series volume number
85
Page numbers
263-270
Language of publication
English

Co-publication information

International co-publication
Yes

Classification and additional information

Subject headings
, microstructures, photopolymers, uv-moulding, replication,