Fabrication of dielectric nanoscale pyramids by wet etching and nano imprint lithography

Not for data collection

Publication information

Category

Artikkelit ja abstraktit

Sub category

Artikkelit ja abstraktit tieteellisissä konferenssijulkaisuissa

Type

Abstrakti

Authors of the publication

Authors

Birgit Päivänranta ja Markku Kuittinen

Local authors

Author

Päivänranta Birgit

Unit

Ei laitostietoa

Publication channel information

Title of host publication

Micro- and NanoEngineering Abstract Book

Internationality

Yes

Detailed publication information

Publication year

2008

Page numbers

584

Language of publication

English