Fabrication of dielectric nanoscale pyramids by wet etching and nano imprint lithography

Not for data collection

Authors of the publication

Authors
Birgit Päivänranta ja Markku Kuittinen
Local authors
Author
Päivänranta Birgit
Unit
Ei laitostietoa

Publication channel information

Title of host publication
Micro- and NanoEngineering Abstract Book
Internationality
Yes

Detailed publication information

Publication year
2008
Page numbers
584
Language of publication
English