Atomic Layer Deposition of Molybdenum Nitride from Bis(tert-butylimido)-bis(dimethylamido)molybdenum and Ammonia onto Several Types of Substrate Materials with equal Growth per Cycle

Not for data collection

Publication information

OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Authors
Miikkulainen V.;Suvanto M.;Pakkanen T.A.
Local authors
Author
Pakkanen Tapani
Unit
Ei laitostietoa

Publication channel information

Title of journal/series
Chem. Mater.
Internationality
Yes

Detailed publication information

Publication year
2007
Journal/series volume number
19
Page numbers
263-269
Language of publication
English

Co-publication information

International co-publication
No