Atomic Layer Deposition of Molybdenum Nitride from Bis(tert-butylimido)-bis(dimethylamido)molybdenum and Ammonia onto Several Types of Substrate Materials with equal Growth per Cycle
Not for data collection
Publication channel information
Title of journal/series
Chem. Mater.
Internationality
Yes
Detailed publication information
Publication year
2007
Journal/series volume number
19
Page numbers
263-269
Language of publication
English
Co-publication information
International co-publication
No