Atomic Layer Deposition of Molybdenum Nitride from Bis(tert-butylimido)-bis(dimethylamido)molybdenum and Ammonia onto Several Types of Substrate Materials with equal Growth per Cycle

Not for data collection

Publication information

OKM publication type

A1

Category

Artikkelit ja abstraktit

Sub category

Tieteelliset aikakauslehtiartikkelit

Type

Alkuperäisartikkeli

Refereed

Kyllä

Authors of the publication

Authors

Miikkulainen V.;Suvanto M.;Pakkanen T.A.

Local authors

Author

Pakkanen Tapani

Unit

Ei laitostietoa

Publication channel information

Title of journal/series

Chem. Mater.

Internationality

Yes

Detailed publication information

Publication year

2007

Journal/series volume number

19

Page numbers

263-269

Language of publication

English

Co-publication information

International co-publication

No