Dependence of refractive indexes and extinction coefficients of Al and Ir films on deposition technique and thickness

Not for data collection

Classifications

MinEdu publication type
A3 Book chapter (peer-reviewed)
Category
Artikkelit ja abstraktit
Refereed
Kyllä
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli

Authors of the publication

Authors
Anni Lehmuskero et al

Publication channel information

Title of host publication
Program & Abstracts of 4th International Conference on Spectroscopic Ellipsometry, June, 11-15.
Internationality
Yes

Detailed publication information

Publication year
2007
Page numbers
35
Language of publication
English

Co-publication information

International co-publication
No