Dependence of refractive indexes and extinction coefficients of Al and Ir films on deposition technique and thickness

Not for data collection

Publication information

OKM publication type
A3
Category
Artikkelit ja abstraktit
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Authors
Anni Lehmuskero et al
Local authors
Author
Lehmuskero Anni
Unit
Ei laitostietoa
Unit
Ei laitostietoa
Unit
Ei laitostietoa

Publication channel information

Title of host publication
Program & Abstracts of 4th International Conference on Spectroscopic Ellipsometry, June, 11-15.
Internationality
Yes

Detailed publication information

Publication year
2007
Page numbers
35
Language of publication
English

Co-publication information

International co-publication
No