Dependence of refractive indexes and extinction coefficients of Al and Ir films on deposition technique and thickness
Not for data collection
Classifications
MinEdu publication type
A3 Book chapter (peer-reviewed)
Category
Artikkelit ja abstraktit
Refereed
Kyllä
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli
Publication channel information
Title of host publication
Program & Abstracts of 4th International Conference on Spectroscopic Ellipsometry, June, 11-15.
Internationality
Yes
Detailed publication information
Publication year
2007
Page numbers
35
Language of publication
English
Co-publication information
International co-publication
No