Dependence of refractive indexes and extinction coefficients of Al and Ir films on deposition technique and thickness
Not for data collection
Publication information
OKM publication type
A3
Category
Artikkelit ja abstraktit
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli
Refereed
Kyllä
Publication channel information
Title of host publication
Program & Abstracts of 4th International Conference on Spectroscopic Ellipsometry, June, 11-15.
Internationality
Yes
Detailed publication information
Publication year
2007
Page numbers
35
Language of publication
English
Co-publication information
International co-publication
No