Large area and high-spatial-frequency phase masks by interference lithography
Not for data collection
Publication information
Category
Artikkelit ja abstraktit
Sub category
Artikkelit ja abstraktit tieteellisissä konferenssijulkaisuissa
Type
Abstrakti
Refereed
Ei
Publication channel information
Title of host publication
Proceedings of the XL Annual Conference of the Finnish Physical Society. Tampere, March 9.-11.
Editors of host publication
Martti Kauranen;Ari Laitinen;Jouko Nieminen and Tapio Rantala (eds)
ISBN (print)
952-15-1568-6
Internationality
No
Detailed publication information
Publication year
2006
Language of publication
English
Co-publication information
International co-publication
No