Large area and high-spatial-frequency phase masks by interference lithography

Not for data collection

Authors of the publication

Authors
K. Ventola;H. Tuovinen;P. Laakkonen and M. Kuittinen
Local authors
Author
Ventola Kalle
Unit
Ei laitostietoa
Author
Tuovinen Hemmo
Unit
Ei laitostietoa

Publication channel information

Title of host publication
Proceedings of the XL Annual Conference of the Finnish Physical Society. Tampere, March 9.-11.
Editors of host publication
Martti Kauranen;Ari Laitinen;Jouko Nieminen and Tapio Rantala (eds)
ISBN (print)
952-15-1568-6
Internationality
No

Detailed publication information

Publication year
2006
Language of publication
English

Co-publication information

International co-publication
No