Fabrication of Ni-shims using UV-moulding as an intermediate step

Not for data collection

Authors of the publication

Authors
J. Pietarinen;S. Siitonen;N. Tossavainen;J. Laukkanen and M. Kuittinen
Local authors
Unit
Ei laitostietoa
Unit
Ei laitostietoa
Author
Laukkanen Janne
Unit
Ei laitostietoa

Publication channel information

Title of journal/series
Microelectronic engineering
ISSN (print)
0167-9317
ISSN (electronic)
1873-5568
ISSN (linking)
0167-9317
Publication forum ID
63335
Internationality
Yes

Detailed publication information

Publication year
2006
Journal/series volume number
83
Page numbers
492-498
Language of publication
English

Co-publication information

International co-publication
Yes

Classification and additional information

Subject headings
, uv-moulding, ni-shims,