Fabrication of Ni-shims using UV-moulding as an intermediate step

Not for data collection

Publication information

OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Authors
J. Pietarinen;S. Siitonen;N. Tossavainen;J. Laukkanen and M. Kuittinen
Local authors
Unit
Ei laitostietoa
Unit
Ei laitostietoa
Author
Laukkanen Janne
Unit
Ei laitostietoa

Publication channel information

Title of journal/series
Microelectronic engineering
ISSN (print)
0167-9317
ISSN (electronic)
1873-5568
ISSN (linking)
0167-9317
Publication forum ID
63335
Internationality
Yes

Detailed publication information

Publication year
2006
Journal/series volume number
83
Page numbers
492-498
Language of publication
English

Co-publication information

International co-publication
Yes

Classification and additional information

Subject headings
, uv-moulding, ni-shims,