Fabrication of Ni-shims using UV-moulding as an intermediate step

Not for data collection

Publication information

OKM publication type

A1

Category

Artikkelit ja abstraktit

Sub category

Tieteelliset aikakauslehtiartikkelit

Type

Alkuperäisartikkeli

Refereed

Kyllä

Authors of the publication

Authors

J. Pietarinen;S. Siitonen;N. Tossavainen;J. Laukkanen and M. Kuittinen

Local authors

Unit

Ei laitostietoa

Unit

Ei laitostietoa

Author

Laukkanen Janne

Unit

Ei laitostietoa

Publication channel information

Title of journal/series

Microelectronic engineering

Publication forum ID

63335

Internationality

Yes

Detailed publication information

Publication year

2006

Journal/series volume number

83

Page numbers

492-498

Language of publication

English

Co-publication information

International co-publication

Yes

Classification and additional information

Subject headings

, uv-moulding, ni-shims,