Comparison between the variable dose control and the four level mask technology

Not for data collection

Publication information

OKM publication type
B2
Category
Artikkelit ja abstraktit
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli
Refereed
Ei

Authors of the publication

Authors
H. Elfström;P. Pelli;K. Jefimovs;J. Aikio;M. Karppinen;P. Vahimaa;M. Kuittinen
Local authors
Unit
Ei laitostietoa
Unit
Ei laitostietoa

Publication channel information

Title of host publication
Proceedings of Micro- and Nano-Engineering 2005, MNE 2005 Vienna, Austria 19.9.2005-22.9.2005
Internationality
Yes

Detailed publication information

Publication year
2005
Language of publication
English

Co-publication information

International co-publication
No