Large area submicron surface relief stuctures by interference lithography

Not for data collection

Classifications

MinEdu publication type
B2 Book section
Category
Artikkelit ja abstraktit
Refereed
Ei
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli

Authors of the publication

Authors
H. Tuovinen;J. Karppinen;P. Laakkonen;J. Lautanen;J. Laukkanen;K. Ventola;K. Jefimovs;O. Svirko;M. Kuittinen;J. Turunen;T. Levola
Local authors
Author
Tuovinen Hemmo
Unit
-
Author
Laukkanen Janne
Unit
-
Author
Svirko Olga
Unit
-
Author
Turunen Jari
Unit
-
Author
Ventola Kalle
Unit
-

Publication channel information

Title of host publication
Optics Days-Optiikan päivät Proceedings 2005, Jyväskylä 12.5.2005-13.5.2005
Internationality
No

Detailed publication information

Publication year
2005
Page numbers
65
Language of publication
English

Co-publication information

International co-publication
Yes

Classification and additional information

Keywords
, micro lithography, diffractive optics, nanostructures,