Large area submicron surface relief stuctures by interference lithography
Not for data collection
Publication information
OKM publication type
B2
Category
Artikkelit ja abstraktit
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli
Refereed
Ei
Publication channel information
Title of host publication
Optics Days-Optiikan päivät Proceedings 2005, Jyväskylä 12.5.2005-13.5.2005
Internationality
No
Detailed publication information
Publication year
2005
Page numbers
65
Language of publication
English
Co-publication information
International co-publication
Yes
Classification and additional information
Subject headings
, micro lithography, diffractive optics, nanostructures,