Large area submicron surface relief stuctures by interference lithography
Not for data collection
Publication channel information
Title of host publication
Optics Days-Optiikan päivät Proceedings 2005, Jyväskylä 12.5.2005-13.5.2005
Internationality
No
Detailed publication information
Publication year
2005
Page numbers
65
Language of publication
English
Co-publication information
International co-publication
Yes
Classification and additional information
Subject headings
, micro lithography, diffractive optics, nanostructures,