Rigorous and approximate analysis of metallic gratings in soft X-ray and EUV regions

Not for data collection

Publication information

OKM publication type
A3
Category
Artikkelit ja abstraktit
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Authors
Tuomas Vallius;Pasi Vahimaa and Jari Turunen
Local authors
Author
Vallius Tuomas
Author
Turunen Jari
Unit
Ei laitostietoa
Unit
Ei laitostietoa

Publication channel information

Title of host publication
Photon Management
Title of journal/series
Proceedings of SPIE : the International Society for Optical Engineering
ISSN (print)
0277-786X
ISSN (electronic)
1996-756X
ISSN (linking)
0277-786X
Publisher
SPIE
Publication forum ID
71479
Internationality
Yes

Detailed publication information

Publication year
2004
Page numbers
327-332
Language of publication
English

Co-publication information

International co-publication
No