Rigorous and approximate analysis of metallic gratings in soft X-ray and EUV regions

Not for data collection

Publication information

OKM publication type

A3

Category

Artikkelit ja abstraktit

Sub category

Artikkelit tieteellisissä kokoomateoksissa

Type

Alkuperäisartikkeli

Refereed

Kyllä

Authors of the publication

Authors

Tuomas Vallius;Pasi Vahimaa and Jari Turunen

Local authors

Author

Vallius Tuomas

Author

Turunen Jari

Unit

Ei laitostietoa

Unit

Ei laitostietoa

Publication channel information

Title of host publication

Photon Management

Title of journal/series

Proceedings of SPIE : the International Society for Optical Engineering

Publisher

SPIE

Publication forum ID

71479

Internationality

Yes

Detailed publication information

Publication year

2004

Page numbers

327-332

Language of publication

English

Co-publication information

International co-publication

No