Fabrication of sub-micron high aspect ratio diamond structures with nanoimprint lithography

Approved

Publication information

OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Authors
Karlsson M, Vartianen I, Kuittinen M , Nikolajeff F

Publication channel information

Title of journal/series
Microelectronic engineering
ISSN (print)
0167-9317
ISSN (electronic)
1873-5568
ISSN (linking)
0167-9317
Publication forum ID
63335
Internationality
Yes

Detailed publication information

Publication year
2010
Journal/series volume number
87
Page numbers
2077-2080
Language of publication
English

Co-publication information

International co-publication
Yes