Fabrication of sub-micron high aspect ratio diamond structures with nanoimprint lithography

Approved

Publication information

OKM publication type

A1

Category

Artikkelit ja abstraktit

Sub category

Tieteelliset aikakauslehtiartikkelit

Type

Alkuperäisartikkeli

Refereed

Kyllä

Authors of the publication

Authors

Karlsson M, Vartianen I, Kuittinen M , Nikolajeff F

Publication channel information

Title of journal/series

Microelectronic engineering

Publication forum ID

63335

Internationality

Yes

Detailed publication information

Publication year

2010

Journal/series volume number

87

Page numbers

2077-2080

Language of publication

English

Co-publication information

International co-publication

Yes