Fabrication of sub-micron high aspect ratio diamond structures with nanoimprint lithography

Approved

Authors of the publication

Authors
Karlsson M, Vartianen I, Kuittinen M , Nikolajeff F

Publication channel information

Title of journal/series
Microelectronic engineering
ISSN (print)
0167-9317
ISSN (electronic)
1873-5568
ISSN (linking)
0167-9317
Publication forum ID
63335
Internationality
Yes

Detailed publication information

Publication year
2010
Journal/series volume number
87
Page numbers
2077-2080
Language of publication
English

Co-publication information

International co-publication
Yes