In situ plasma diagnostics for chemical vapor deposition of nano-carbon thin film materials

Not for data collection

Publication information

OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Authors
A. N. Obraztsov;A. A. Zolotukhin ;A. O. Ustinov ;A. P. Volkov ;Yu. P. Svirko;K. Jefimovs
Local authors
Unit
Ei laitostietoa

Publication channel information

Title of journal/series
Microelectronic engineering
ISSN (print)
0167-9317
ISSN (electronic)
1873-5568
ISSN (linking)
0167-9317
Publication forum ID
63335
Internationality
Yes

Detailed publication information

Publication year
2003
Journal/series volume number
69
Page numbers
446-451
Language of publication
English

Co-publication information

International co-publication
Yes

Classification and additional information

Subject headings
, thin film, vapor deposition, carbon film,