Chemical vapor deposition of carbon films: in-situ plasma diagnostics
Not for data collection
Publication information
OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä
Publication channel information
Title of journal/series
Carbon
Internationality
Yes
Detailed publication information
Publication year
2003
Journal/series volume number
41
Page numbers
836-839
Language of publication
English
Co-publication information
International co-publication
Yes
Classification and additional information
Subject headings
, carbon film, plasma,