Chemical vapor deposition of carbon films: in-situ plasma diagnostics

Not for data collection

Publication information

OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Authors
2.A. N. Obraztsov;A. A. Zolotukhin ;A. O. Ustinov ;A. P. Volkov ;Yu. P. Svirko

Publication channel information

Title of journal/series
Carbon
Internationality
Yes

Detailed publication information

Publication year
2003
Journal/series volume number
41
Page numbers
836-839
Language of publication
English

Co-publication information

International co-publication
Yes

Classification and additional information

Subject headings
, carbon film, plasma,