Bis(tert-butylimido)-bis(dialkylamido) complexes of molybdenum as atomic layer deposition (ALD) precursors for molybdenum nitride: the effect of the alkyl group¿
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Publication channel information
Title of journal/series
Chemical vapor deposition
ISSN (print)
0948-1907
ISSN (electronic)
1521-3862
ISSN (linking)
0948-1907
Publication forum ID
53322
Internationality
Yes
Detailed publication information
Publication year
2008
Journal/series volume number
14
Page numbers
71-77
Language of publication
English
Co-publication information
International co-publication
No