Bis(tert-butylimido)-bis(dialkylamido) complexes of molybdenum as atomic layer deposition (ALD) precursors for molybdenum nitride: the effect of the alkyl group¿

Not for data collection

Publication information

OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Authors
Ville Miikkulainen, Mika Suvanto, and Tapani A. Pakkanen
Local authors
Author
Pakkanen Tapani
Unit
Ei laitostietoa

Publication channel information

Title of journal/series
Chemical vapor deposition
ISSN (print)
0948-1907
ISSN (electronic)
1521-3862
ISSN (linking)
0948-1907
Publication forum ID
53322
Internationality
Yes

Detailed publication information

Publication year
2008
Journal/series volume number
14
Page numbers
71-77
Language of publication
English

Co-publication information

International co-publication
No