Bis(tert-butylimido)-bis(dialkylamido) complexes of molybdenum as atomic layer deposition (ALD) precursors for molybdenum nitride: the effect of the alkyl group¿

Not for data collection

Publication information

OKM publication type

A1

Category

Artikkelit ja abstraktit

Sub category

Tieteelliset aikakauslehtiartikkelit

Type

Alkuperäisartikkeli

Refereed

Kyllä

Authors of the publication

Authors

Ville Miikkulainen, Mika Suvanto, and Tapani A. Pakkanen

Local authors

Author

Pakkanen Tapani

Unit

Ei laitostietoa

Publication channel information

Title of journal/series

Chemical vapor deposition

Publication forum ID

53322

Internationality

Yes

Detailed publication information

Publication year

2008

Journal/series volume number

14

Page numbers

71-77

Language of publication

English

Co-publication information

International co-publication

No