Analysis and fabrication of analog surface profiles in non-paraxial diffractive optics

Not for data collection

Publication information

OKM publication type
B2
Category
Artikkelit ja abstraktit
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli
Refereed
Ei

Authors of the publication

Authors
Simonen Janne;Vallius Tuomas;Laakkonen Pasi;Kuittinen Markku;Turunen Jari
Local authors
Unit
Ei laitostietoa
Author
Turunen Jari
Unit
Ei laitostietoa
Author
Vallius Tuomas
Unit
Ei laitostietoa

Publication channel information

Title of host publication
Optics Days 2002 Proceedings
ISBN (print)
951-42-6588-2
Publisher
Finnish Optical Society
Internationality
No

Detailed publication information

Publication year
2002
Page numbers
57
Language of publication
English

Co-publication information

International co-publication
No

Classification and additional information

Subject headings
, e-beam lithography, optical modeling, diffractive optics,