Analysis and fabrication of analog surface profiles in non-paraxial diffractive optics
Not for data collection
Publication information
OKM publication type
B2
Category
Artikkelit ja abstraktit
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli
Refereed
Ei
Publication channel information
Title of host publication
Optics Days 2002 Proceedings
ISBN (print)
951-42-6588-2
Publisher
Finnish Optical Society
Internationality
No
Detailed publication information
Publication year
2002
Page numbers
57
Language of publication
English
Co-publication information
International co-publication
No
Classification and additional information
Subject headings
, e-beam lithography, optical modeling, diffractive optics,