Analysis and fabrication of analog surface profiles in non-paraxial diffractive optics
Not for data collection
Publication channel information
Title of host publication
Optics Days 2002 Proceedings
ISBN (print)
951-42-6588-2
Publisher
Finnish Optical Society
Internationality
No
Detailed publication information
Publication year
2002
Page numbers
57
Language of publication
English
Co-publication information
International co-publication
No
Classification and additional information
Subject headings
, e-beam lithography, optical modeling, diffractive optics,