Hydrophobic and oleophobic anti-reflective polyacrylate coatings

Approved

Authors of the publication

Number of authors
7
Authors
Joki-Korpela Fatima, Karvinen Jennika, Päivänranta Birgit, Partanen Anni, Suvanto Mika, Kuittinen Markku, Pakkanen Tuula T

Publication channel information

Title of journal/series
Microelectronic engineering
ISSN (print)
0167-9317
ISSN (electronic)
1873-5568
ISSN (linking)
0167-9317
Publication forum ID
63335
Publication forum level
1
Internationality
Yes

Detailed publication information

Publication year
2014
Reporting year
2014
Journal/series volume number
114
Page numbers
38-46
DOI
10.1016/j.mee.2013.09.010
Language of publication
English

Co-publication information

International co-publication
No

Classification and additional information

MinEdu field of science classification
114 Physical sciences, 116 Chemical sciences
Additional information
http://dx.doi.org/10.1016/j.mee.2013.09.010,