Hydrophobic and oleophobic anti-reflective polyacrylate coatings

Approved

Publication information

OKM publication type

A1

Category

Artikkelit ja abstraktit

Sub category

Tieteelliset aikakauslehtiartikkelit

Type

Alkuperäisartikkeli

Refereed

Kyllä

Authors of the publication

Number of authors

7

Authors

Joki-Korpela Fatima, Karvinen Jennika, Päivänranta Birgit, Partanen Anni, Suvanto Mika, Kuittinen Markku, Pakkanen Tuula T

Publication channel information

Title of journal/series

Microelectronic engineering

Publication forum ID

63335

Publication forum level

1

Internationality

Yes

Detailed publication information

Publication year

2014

Reporting year

2014

Journal/series volume number

114

Page numbers

38-46

DOI

10.1016/j.mee.2013.09.010

Language of publication

English

Co-publication information

International co-publication

No

Classification and additional information

MinEdu field of science classification

114 Physical sciences, 116 Chemical sciences

Additional information

http://dx.doi.org/10.1016/j.mee.2013.09.010,