Hydrophobic and oleophobic anti-reflective polyacrylate coatings
Approved
Classifications
MinEdu publication type
A1
Category
Artikkelit ja abstraktit
Refereed
Kyllä
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Publication information
OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä
Publication channel information
Title of journal/series
Microelectronic engineering
ISSN (print)
0167-9317
ISSN (electronic)
1873-5568
ISSN (linking)
0167-9317
Publication forum ID
63335
Publication forum level
1
Internationality
Yes
Detailed publication information
Publication year
2014
Reporting year
2014
Journal/series volume number
114
Page numbers
38-46
DOI
10.1016/j.mee.2013.09.010
Language of publication
English
Co-publication information
International co-publication
No
Classification and additional information
MinEdu field of science classification
114 Physical sciences, 116 Chemical sciences
Additional information
http://dx.doi.org/10.1016/j.mee.2013.09.010,