Femtosecond laser processing and spatial light modulator
Publication information
OKM publication type
A4
Category
Artikkelit ja abstraktit
Sub category
Artikkelit ja abstraktit tieteellisissä konferenssijulkaisuissa
Type
Full Paper
Refereed
Kyllä
Publication channel information
Title of host publication
Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XIX
Editors of host publication
Nakata, Y. Xu, X. Roth, S. Neuenschwander, B
ISBN (print)
9.78082E+12
Name of conference
Spie photonics west
Name of conference
Laser applications in microelectronic and optoelectronic manufacturing
Publisher
SPIE
Publication forum ID
72555
Publication forum level
0
Internationality
Yes
Detailed publication information
Publication year
2014
Reporting year
2014
Page numbers
89670F-1 - 89670F-6
DOI
10.1117/12.2044459
Language of publication
English
Co-publication information
International co-publication
No
Classification and additional information
MinEdu field of science classification
114 Physical sciences