Impact of ALD grown passivation layers on silicon nitride based integrated optic devices for very-near-infrared wavelengths

Approved

Classifications

MinEdu publication type
A1
Category
Artikkelit ja abstraktit
Refereed
Kyllä
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli

Authors of the publication

Number of authors
9
Authors
Khanna Amit, Subramanian Ananth, Häyrinen Markus, Selvaraja Shankar, Verheyen Peter, Van Thourhout Dries, Honkanen Seppo, Lipsanen Harri, Baets Roel

Publication channel information

Title of journal/series
Optics express
ISSN (electronic)
1094-4087
ISSN (linking)
1094-4087
Publication forum ID
64457
Publication forum level
2
Internationality
Yes

Detailed publication information

Publication year
2014
Reporting year
2014
Journal/series volume number
22
Journal/series issue number
5
Page numbers
5684-5692
DOI
10.1364/OE.22.005684

Co-publication information

International co-publication
Yes

Classification and additional information

MinEdu field of science classification
114 Physical sciences