Impact of ALD grown passivation layers on silicon nitride based integrated optic devices for very-near-infrared wavelengths

Approved

Publication information

OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Number of authors
9
Authors
Khanna Amit, Subramanian Ananth, Häyrinen Markus, Selvaraja Shankar, Verheyen Peter, Van Thourhout Dries, Honkanen Seppo, Lipsanen Harri, Baets Roel
Local authors
Author
Häyrinen Markus
Author
Honkanen Seppo

Publication channel information

Title of journal/series
Optics express
ISSN (electronic)
1094-4087
ISSN (linking)
1094-4087
Publication forum ID
64457
Publication forum level
2
Internationality
Yes

Detailed publication information

Publication year
2014
Reporting year
2014
Journal/series volume number
22
Journal/series issue number
5
Page numbers
5684-5692
DOI
10.1364/OE.22.005684

Co-publication information

International co-publication
Yes

Classification and additional information

MinEdu field of science classification
114 Physical sciences