Application of atomic layer deposition in nanophotonics

Approved

Classifications

MinEdu publication type
A3 Book chapter (peer-reviewed)
Category
Artikkelit ja abstraktit
Refereed
Kyllä
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli

Authors of the publication

Number of authors
5
Authors
Karvonen Lasse, Säynätjoki Antti, Roussey Matthieu, Kuittinen Markku, Honkanen Seppo

Publication channel information

Title of host publication
Integrated Optics: Devices, Materials, and Technologies XVIII
Editors of host publication
Jean Emmanuel Broquin, Gualtiero Nunzi Conti
ISBN (print)
-
Title of journal/series
Proceedings of SPIE : the International Society for Optical Engineering
ISSN (print)
0277-786X
ISSN (electronic)
1996-756X
ISSN (linking)
0277-786X
Publisher
SPIE
Publication forum ID
71479
Publication forum level
1
Internationality
Yes

Detailed publication information

Publication year
2014
Reporting year
2014
Page numbers
89880Z
DOI
10.1117/12.2042263

Co-publication information

International co-publication
No

Classification and additional information

MinEdu field of science classification
114 Physical sciences