Application of atomic layer deposition in nanophotonics
Approved
Publication information
OKM publication type
A3
Category
Artikkelit ja abstraktit
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli
Refereed
Kyllä
Publication channel information
Title of host publication
Integrated Optics: Devices, Materials, and Technologies XVIII
Editors of host publication
Jean Emmanuel Broquin, Gualtiero Nunzi Conti
ISBN (print)
-
Title of journal/series
Proceedings of SPIE : the International Society for Optical Engineering
ISSN (print)
0277-786X
ISSN (electronic)
1996-756X
ISSN (linking)
0277-786X
Publisher
SPIE
Publication forum ID
71479
Publication forum level
1
Internationality
Yes
Detailed publication information
Publication year
2014
Reporting year
2014
Page numbers
89880Z
DOI
10.1117/12.2042263
Co-publication information
International co-publication
No
Classification and additional information
MinEdu field of science classification
114 Physical sciences