Application of atomic layer deposition in nanophotonics
Approved
Classifications
MinEdu publication type
A3 Book chapter (peer-reviewed)
Category
Artikkelit ja abstraktit
Refereed
Kyllä
Sub category
Artikkelit tieteellisissä kokoomateoksissa
Type
Alkuperäisartikkeli
Publication channel information
Title of host publication
Integrated Optics: Devices, Materials, and Technologies XVIII
Editors of host publication
Jean Emmanuel Broquin, Gualtiero Nunzi Conti
ISBN (print)
-
Title of journal/series
Proceedings of SPIE : the International Society for Optical Engineering
ISSN (print)
0277-786X
ISSN (electronic)
1996-756X
ISSN (linking)
0277-786X
Publisher
SPIE
Publication forum ID
71479
Publication forum level
1
Internationality
Yes
Detailed publication information
Publication year
2014
Reporting year
2014
Page numbers
89880Z
DOI
10.1117/12.2042263
Co-publication information
International co-publication
No
Classification and additional information
MinEdu field of science classification
114 Physical sciences