Sub-micron resolution high-speed spectral domain optical coherence tomography in quality inspection for printed electronics
Approved
Publication channel information
Title of host publication
Optical Micro- and Nanometrology IV
Editors of host publication
Christophe Gorecki, Anand K Asundi, Wolfgang Osten
ISBN (print)
-
Title of journal/series
Proceedings of SPIE : the International Society for Optical Engineering
ISSN (print)
0277-786X
ISSN (electronic)
1996-756X
ISSN (linking)
0277-786X
Publisher
SPIE
Publication forum ID
71479
Publication forum level
1
Country of publication
Belgium
Internationality
Yes
Detailed publication information
Publication year
2012
Reporting year
2012
Page numbers
84300K
DOI
10.1117/12.922443
Co-publication information
International co-publication
Yes
Classification and additional information
MinEdu field of science classification
114 Physical sciences