Coating technique for e-beam sensitive polymers on non-flat surfaces and their suitability for e-beam exposure

Not for data collection

Publication information

Category

Artikkelit ja abstraktit

Sub category

Artikkelit ja abstraktit tieteellisissä konferenssijulkaisuissa

Type

Abstrakti

Authors of the publication

Authors

B. Päivänranta, K. Leinonen, M. Kuittinen, M. Pudas ja O. Pitkänen

Local authors

Author

Päivänranta Birgit

Unit

Ei laitostietoa

Author

Leinonen Kari

Unit

Ei laitostietoa

Publication channel information

Title of host publication

The 53rd international conference on electron, ion, and photon beam technology and nanofabrication

Internationality

Yes

Detailed publication information

Publication year

2009

Page numbers

P-1F-25