Coating technique for e-beam sensitive polymers on non-flat surfaces and their suitability for e-beam exposure

Not for data collection

Publication information

Category
Artikkelit ja abstraktit
Sub category
Artikkelit ja abstraktit tieteellisissä konferenssijulkaisuissa
Type
Abstrakti

Authors of the publication

Authors
B. Päivänranta, K. Leinonen, M. Kuittinen, M. Pudas ja O. Pitkänen
Local authors
Author
Päivänranta Birgit
Unit
Ei laitostietoa
Author
Leinonen Kari
Unit
Ei laitostietoa

Publication channel information

Title of host publication
The 53rd international conference on electron, ion, and photon beam technology and nanofabrication
Internationality
Yes

Detailed publication information

Publication year
2009
Page numbers
P-1F-25