Spatially resolved in situ diagnostics for plasma-enhanced chemical vapor deposition carbon film growth

Approved

Publication information

OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä

Authors of the publication

Number of authors
4
Authors
Ismagilov RR, Zolotukhin AA, Shvets PV, Obraztsov AN

Publication channel information

Title of journal/series
Journal of nanoelectronics and optoelectronics
ISSN (print)
1555-130X
ISSN (electronic)
1555-1318
ISSN (linking)
1555-130X
Publication forum ID
75362
Country of publication
United States
Internationality
Yes

Detailed publication information

Publication year
2012
Reporting year
2012
Journal/series volume number
7
Journal/series issue number
1
Page numbers
90-94
DOI
10.1166/jno.2012.1224

Co-publication information

International co-publication
Yes

Classification and additional information

MinEdu field of science classification
114 Physical sciences