Spatially resolved in situ diagnostics for plasma-enhanced chemical vapor deposition carbon film growth
Approved
Publication information
OKM publication type
A1
Category
Artikkelit ja abstraktit
Sub category
Tieteelliset aikakauslehtiartikkelit
Type
Alkuperäisartikkeli
Refereed
Kyllä
Publication channel information
Title of journal/series
Journal of nanoelectronics and optoelectronics
Publication forum ID
75362
Country of publication
United States
Internationality
Yes
Detailed publication information
Publication year
2012
Reporting year
2012
Journal/series volume number
7
Journal/series issue number
1
Page numbers
90-94
DOI
10.1166/jno.2012.1224
Co-publication information
International co-publication
Yes
Classification and additional information
MinEdu field of science classification
114 Physical sciences